## Introduction to Microsystem DesignThe book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book. |

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### Contents

2 | |

4 | |

6 | |

9 | |

Conductor Paths | 21 |

Membranes | 29 |

Strain Gauges on Membranes | 53 |

Beams | 65 |

Microoptics | 177 |

Diffusion | 191 |

Microvalves | 203 |

Micropumps | 229 |

Microdosing | 251 |

Analogies of Physical Domains | 253 |

Mechanical Devices for Electronics | 261 |

Pressure Sensors | 275 |

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### Common terms and phrases

achieved actuator anemometer approximately beam clamped bimorph calculated capacitor carrier characteristic curve circular membrane coefficient compressive stress conductor path constant counter pressure cross-section ð Þ dead volume deflection w0 density distance Dpmax DVmax effect electrical electrical resistance electrodes employed energy output feed channels flow rate flow velocity fluid fluidic heat heat conductivity heater hydraulic diameter inlet larger layer length linear liquid maximum deflection measured membrane membrane deflection micropump microtechnique microvalve needs neutral fiber outlet valve output voltage parameters piezo piezoelectric piezoelectric effect Poisson’s ratio polyimide pressure difference pressure drop pressure sensor radius refractive index residual stress resistance change resonance frequency respectively seismic mass shown in Fig shows silicon strain gauges stroke substrate surface switching tangential strain temperature changes thermal thickness thin film thin membrane transversal valve body valve seat vibrating viscosity voltage waveguide width Young’s modulus zero