Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.
A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.
Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.
New in the Second Edition
What people are saying - Write a review
2.2 SCREM process for dry etching is detailed and explanatory.
Madou is very thorough in the coverage of material in the fabrication of MEMs. He writes clear explanations of the processes and the factors of these processes. This book is extensive and comprehensive.