Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

Front Cover
CRC Press, Mar 13, 2002 - Technology & Engineering - 752 pages
6 Reviews
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition
  • Revised chapters that reflect the many recent advances in the field
  • Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
  • In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
  • Many more links to the Web
  • Problem sets in each chapter
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    2.2 SCREM process for dry etching is detailed and explanatory.

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    Madou is very thorough in the coverage of material in the fabrication of MEMs. He writes clear explanations of the processes and the factors of these processes. This book is extensive and comprehensive.

    Contents

    I
    1
    II
    77
    III
    123
    IV
    183
    V
    259
    VI
    325
    VII
    379
    IX
    467
    X
    535
    XI
    615
    Copyright

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