Sensors, Update 9Henry Baltes, W. Göpel, J. Hesse, Jan G. Korvink Sensors Update ensures that you stay at the cutting edge of the field. Built upon the series Sensors, it presents an overview of highlights in the field. Coverage includes current developments in materials, design, production, and applications of sensors, signal detection and processing, as well as new sensing principles. Each volume is divided into three sections. Sensor Technology, reviews highlights in applied and basic research, Sensor Applications, covers new or improved applications of sensors, Sensor Markets, provides a survey of suppliers and market trends for a particular area. With this unique combination of information in each volume, Sensors Update will be of value for scientists and engineers in industry and at universities, to sensors developers, distributors, and users. |
Contents
Wafer Feedthrough Technologies | 25 |
MaskResist Distance | 45 |
Fabrication of the SNOM Probes | 244 |
Copyright | |
2 other sections not shown
Common terms and phrases
acoustic wave Acta Actuators adsorbed adsorption alarm aldehydes Amperometry Anal analysis analyte antibody antigen applications assay automotive benzaldehyde Bioelectron Biosens biosensors bonding bulk micromachining capacitance cell Chem chemical sensors Chim circuit coefficient concentration conveyor density deposition detector developed devices electrical electronic electroplating enzyme etching fabrication feedthrough interconnects film fire detection gas sensor IEEE immobilized immunoassay immunosensors increase interface intermediate layer lignite liquid Love mode LPCVD mass material measured mechanical membrane metal microacoustic micromachining microphone molecules monitoring monolayer optical optode oscillation parameters PECVD Phys piezoelectric plate properties protein quartz crystal quartz crystal microbalance refractive index resistance resonance frequency sample Sens sensitivity shear shown in Figure shows signal silica SiO2 smoldering SnO2 structure substrate surface technique temperature template thickness through-hole tion transducer vapor vehicle velocity viscoelastic viscosity voltage wafer waveguide wavelength wet etched wire