Analysis of Microelectronic Materials and Devices

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Wiley, 1991 - Science - 934 pages
Presents a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered has been achieved by bringing together an international field of authors contributing specialized chapters.

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Contents

Contributors
ix
Prologue
xv
List of Major Abbreviations and Acronyms
xliii
Copyright

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