Excimer Laser Technology

Front Cover
Dirk Basting, Gerd Marowsky
Springer Science & Business Media, Dec 5, 2005 - Technology & Engineering - 433 pages
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A timely and comprehensive survey, Excimer Laser Technology reports on the current status and range of the underlying technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology.

 

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Contents

2
33
Principles of Excimer Lasers
41
Design and Technology of Excimer Lasers 47
46
Specially Designed Excimer Lasers
75
Excimer Lasers for Microlithography
89
Laser Beam Characterization 105
104
Optical Coatings for Excimer Laser Applications
119
Small Structures with Large Excimer Lasers
127
Ablative MicroFabrication
149
References
199
F2Laser Microfabrication for Photonics
220
NanoStructuring
279
Material Modification
295
ExtremeUltraviolet EUV Technology
398
List of Abbreviations
423
Copyright

Overview 139
138

Common terms and phrases