Reliability, Testing, and Characterization of MEMS/MOEMS.

Front Cover

From inside the book

What people are saying - Write a review

We haven't found any reviews in the usual places.

Contents

KEYNOTE PAPER
1
Parametric yield enhancement of a microresonator using statistical optimization tools
22
THERMOMECHANICAL
32
Copyright

13 other sections not shown

Common terms and phrases

Bibliographic information