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Parametric yield enhancement of a microresonator using statistical optimization tools
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accelerometer actuation adhesion applications array asperities beam cantilever capacitance Characterization of MEMS/MOEMS chemical chip clamp coating components contact resistance cycles deflection deformation deposited digital holography displacement electrical electrode electrostatic energy storage equation etching experimental fabrication failure Figure film force fracture toughness frequency friction gold heat-treatment holograms holographic interferograms IEEE inchworm ink-jet integrated interferometry laser layer liquid Load Cell manufacturing materials measured mechanical MEMS devices MEMS Reliability MEMS structures metal methanol method micro devices micro technology Microelectromechanical Microelectromechanical Systems microspacecraft mirror mode MOEMS MUMPs notched operation optical optimization outgassing oxide packaging parameters particles performed phase piezoelectric plate polysilicon propulsion Rajeshuni Ramesham samples Sandia National Laboratories sensor LSI shown in Fig silicon nitride specimens SPIE stiction stress substrate surface micromachining switch techniques temperature tensile thermal thickness tungsten valve vapor velocity voltage yield