Etching in Microsystem Technology

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Wiley, 1999 - Science - 368 pages
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Michael Köhler Etching in Microsystem Technolgy Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern micro-devices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath compositions, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.

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About the author (1999)

As a career educator, parent, coach, and athlete, Michael Koehler knows a lot about kids and sports. The grandson of athletic icon Jim Thorpe, Koehler played football at the University of Nebraska under coaching greats Tom Osborne and George Kelly. After being sidelined with an injury, Koehler decided to stay in school and pursue a career in education. Koehler credits that decision to the strong influence of George Kelly, to whom Koehler has dedicated this book. Koehler has worked as a counselor, English teacher, college professor, and administrator. He coached high school football throughout his academic career, providing hundreds of kids with a positive and meaningful athletic experience. Koehler has written and spoken widely on high school athletics and has been honored as a Distinguished Alumnus at the University of Nebraska and as a member of the United States Olympic Committee's Project Gold. This is Koehler's 17th book, following Coaching Character at Home: Strategies for Raising Responsible Teens (Sorin Books 2002). Koehler lives in Northern Wisconsin (Minoqua).

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