Current Developments in Optical Design and Optical Engineering, Volume 2SPIE, 1992 - Optical instruments |
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Page 63
... silicon carbide , fused silica , aluminum , and copper . Single crystal silicon , germanium and sapphire as well as polycrystalline CVD silicon carbide did not significantly roughen during ion milling . The roughness evolution of ...
... silicon carbide , fused silica , aluminum , and copper . Single crystal silicon , germanium and sapphire as well as polycrystalline CVD silicon carbide did not significantly roughen during ion milling . The roughness evolution of ...
Page 66
... Silicon Carbide . Several pre - ion milling fabrication processes were used to prepare SiC samples for ion milling ... silicon carbide fabrication processes tested , the ductile grinding process was found to result in the lowest ...
... Silicon Carbide . Several pre - ion milling fabrication processes were used to prepare SiC samples for ion milling ... silicon carbide fabrication processes tested , the ductile grinding process was found to result in the lowest ...
Page 67
... silicon carbide : precision and ductile ground . ( a ) 2 ductile ground SiC 3 Ion Mill Depth ( μm ) Fig . 5 Roughness evolution plots for silicon carbide improved ductile ground and polished . 85KU X308 4P 5244 6262 ( b ) Figure 6 ...
... silicon carbide : precision and ductile ground . ( a ) 2 ductile ground SiC 3 Ion Mill Depth ( μm ) Fig . 5 Roughness evolution plots for silicon carbide improved ductile ground and polished . 85KU X308 4P 5244 6262 ( b ) Figure 6 ...
Contents
Assembly Methods and Materials for Optical Systems | 1 |
Finite element analysis for LROS telescope 175203 | 12 |
Design and performance of an automated videobased laserbeam alignment system 175204 | 20 |
Copyright | |
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angle aperture aspheric astigmatism athermal beam alignment beam divergence beamsplitter birefringence calculated CCOS Center for Optics chromatic chromatic aberration coefficient cold shield coma compact disk components deflector depolarizer detector diameter diamond turned diffraction dimensional elements Engineering entrance pupil equation errors fabrication field Figure focal length frequency fringe function glass grinding interferogram Invar ion milling Kennametal laser beam lens design lenses linear long term machine magnification material measured method microscope mirror moisture noise optic axis optical design optical surfaces optical system Opticam SM Optics Manufacturing parameters phase photon plane plate polarization polishing ppm/yr prism Process Science production resonator roughness evolution sample scanning sensor Shandong shown in Fig silicon carbide specimens spherical aberration spindle stability stepper motor subaperture surface roughness telescope temperature thermal thickness tilt tool vector VMEbus wavefront wavefront sensor wavelength weight