## Spatial Variation of the RF Electromagnetic Induction Fields from Simple Antenna Configurations |

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according analytical antenna consisting antenna elements antiparallel approximation assumption calculation capacitive coupling collision compared comparison conductors constant current flow decrease dependence destructive determine dielectric difference diffusion dipole display distance effects electric field magnitude electric field profile electron density profile electron heating EM fields energy relaxation length Equations example exists expression factor follows geometries gives humped increases indicate induction fields inductive infinite wire integrals interest ionization jweo larger length of wire localized low values Madison magnetic field neighboring wires observation obtain opposite directions oscillating parallel parallel and antiparallel path perpendicular peaked plane containing plasma plasma density plot possible potential predict processing profiles in Figure radiation region relatively relevant requirements scale segments shape shown in Figure spatial profile spatial structure spatial variation spiral substrates sustained taking transfer turns understanding uniformity vacuum fields vector wire separation