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Replicated diffractive optical lens components for laserdiodetofiber coupling in optical
Thermal management in planar optical systems with active components 322606
Compact optical interconnect module 322620
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alignment angle applications array AutoCAD auxiliary flexure backbending beam buried junction calixarene chip collimated configuration coupling curve deflection deposition detection detector device diameter diffractive optical diffusion displacement sensor distance efficiency electronic electrostatically actuated etching experimental FDDI fiber laser films force flexures frequency function grating gray-tone IEEE imaging increase integrated optical intensity laser diode layer lens lenses light linear Mach-Zehnder interferometer mask measured mechanical membrane MEMCAD MEMS Michelson interferometer micro-optical micro-optical elements microlens micromachining micromirror micron microscope mirror modeling nonlinear obtained optical bench optical elements optical fiber optical switch optical system output signals p-n junction package parameters passive pattern phase shifted photocurrents photoresist planar plate polysilicon porous Proc ratio realized refractive refractive index resist samples shown in Figure silicon nitride simulated SPIE Vol spring constant structure substrate surface surface micromachining surface-micromachined temperature thickness torsion VCSEL vertical thermal actuators wafer waveguide wavelength