Microelectronic Structures and MEMS for Optical Processing, Volume 3226SPIE--The International Society for Optical Engineering, 1997 - Microelectronics |
Contents
Fabrication of microrelief surfaces using a onestep lithography process Invited Paper | 2 |
MICROOPTICAL COMPONENTS AND OPTICAL INTERCONNECTS | 31 |
Replicated diffractive optical lens components for laserdiodetofiber coupling in optical | 44 |
Copyright | |
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alignment angle applications array auxiliary flexure backbending beam buried junction calixarene chip collimated configuration coupler coupling curve deflection deposition detection detector device diameter diffractive optical diffusion displacement sensor electrical electronic electrostatically actuated etching experimental fabrication FDDI fiber laser films frequency function grating gray-tone IEEE imaging input integrated optical laser diode layer lens lenses light linear Mach-Zehnder interferometer mask measured mechanical membrane MEMCAD MEMS Michelson interferometer micro-optical micro-optical elements microlens micromachining micromirror microns microscope mirror mode modeling modulator obtained optical bench optical components optical elements optical fiber optical switch output signals p-n junction parameters passive pattern phase shifted photocurrents photoresist planar plate polymer polysilicon porous Proc ratio realized refractive resist shown in Figure silicon nitride simulated snap-through SPIE Vol spring constant structure substrate surface surface micromachining surface-micromachined temperature thickness torsion VCSEL vertical thermal actuators voltage wafer waveguide wavelength