Design and Operation of Clean Rooms |
Contents
Introduction to Clean Rooms | 1 |
Conventional Clean Room Design | 133 |
Chapter 10 | 290 |
Copyright | |
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aerosol air flow Air Force air shower assembly bench blower BRANCH INDUSTRIAL ENGINEERING calibration ceiling clean room design clean work station cleanliness components Contamination Control contamination level count Courtesy cubic foot Dacron device duct dust electrical ENGINEERING DIVISION DIRECTORATE equipment facility feet fibers filter bank filter unit flow clean room fluid garments Height of sample HEPA filters hours Place humidity inches from floor installed Instrument laminar flow laminar flow clean light load located MAINTENANCE HEADQUARTERS MAAMA material ment metal method microscope Millipore Millipore Filter minute monitoring number of particles nylon Observations on Curve operating room particle counter PARTICLE SIZE DISTRIBUTION PARTICLE SIZE MICRONS particles per cubic PARTICLES/CUBIC FOOT EQUAL particulate matter Person Performing Test personnel photometer photomultiplier plastic pressure problem PROJECTS BRANCH INDUSTRIAL result Sample Characteristics seal solvent surface tamination technique temperature ticles tion ultrasonic cleaning vacuum velocity wall