The Physics of Micro/Nano-Fabrication

Front Cover
Springer Science & Business Media, 1992 - Science - 650 pages
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
 

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Contents

I
1
II
2
III
4
IV
6
V
11
VI
15
VIII
18
IX
19
CLIX
352
CLX
353
CLXI
355
CLXII
358
CLXIII
359
CLXIV
361
CLXV
362
CLXVI
366

X
20
XI
26
XII
27
XIII
30
XV
32
XVI
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XVII
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XVIII
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XIX
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XXI
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XXIII
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XXV
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XXVI
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XXVIII
51
XXIX
55
XXX
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XXXI
62
XXXII
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XXXIII
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XXXIV
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XXXV
74
XXXVII
77
XXXVIII
81
XXXIX
83
XL
90
XLI
95
XLII
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XLIII
100
XLIV
105
XLVI
107
XLVII
108
XLIX
109
LI
112
LII
116
LIII
121
LIV
132
LV
138
LVI
140
LVII
143
LVIII
145
LIX
152
LX
158
LXIII
160
LXV
161
LXVI
162
LXVII
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LXVIII
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LXIX
170
LXX
171
LXXI
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LXXII
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LXXIII
177
LXXIV
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LXXV
183
LXXVI
185
LXXVII
188
LXXVIII
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LXXX
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LXXXI
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LXXXII
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LXXXIII
199
LXXXIV
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LXXXV
202
LXXXVII
203
LXXXVIII
204
LXXXIX
206
XC
207
XCI
208
XCII
211
XCIII
217
XCIV
220
XCV
225
XCVI
229
XCVII
232
XCVIII
234
XCIX
240
C
241
CI
245
CII
250
CIV
251
CV
259
CVI
260
CVII
262
CVIII
263
CIX
265
CXII
267
CXIII
268
CXIV
269
CXV
270
CXVI
271
CXVII
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CXVIII
273
CXIX
275
CXX
276
CXXI
277
CXXII
280
CXXIII
282
CXXIV
284
CXXV
286
CXXVI
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CXXVIII
292
CXXX
293
CXXXII
295
CXXXIII
297
CXXXIV
298
CXXXV
305
CXXXVI
308
CXXXVII
310
CXXXVIII
312
CXXXIX
313
CXL
315
CXLI
319
CXLII
320
CXLIII
322
CXLIV
324
CXLV
326
CXLVII
328
CXLIX
333
CL
335
CLI
338
CLII
340
CLIII
342
CLIV
346
CLV
347
CLVIII
348
CLXVII
367
CLXVIII
369
CLXX
371
CLXXI
373
CLXXIII
374
CLXXIV
376
CLXXV
378
CLXXVI
379
CLXXVII
381
CLXXVIII
385
CLXXIX
386
CLXXX
388
CLXXXI
392
CLXXXIII
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CLXXXIV
395
CLXXXV
396
CLXXXVI
397
CLXXXVII
399
CLXXXVIII
401
CLXXXIX
402
CXC
404
CXCI
407
CXCII
408
CXCIV
410
CXCVI
411
CXCVII
416
CXCVIII
417
CXCIX
418
CCI
419
CCII
421
CCIII
422
CCV
425
CCVI
428
CCVII
431
CCVIII
434
CCX
435
CCXI
436
CCXII
439
CCXIII
442
CCXV
444
CCXVII
445
CCXIX
453
CCXX
455
CCXXI
456
CCXXII
457
CCXXIII
464
CCXXIV
465
CCXXV
466
CCXXVI
467
CCXXVII
471
CCXXVIII
472
CCXXX
474
CCXXXI
475
CCXXXII
477
CCXXXIII
479
CCXXXIV
480
CCXXXV
482
CCXXXVI
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CCXXXVII
485
CCXXXVIII
486
CCXXXIX
487
CCXL
488
CCXLI
491
CCXLII
493
CCXLIII
494
CCXLIV
505
CCXLVI
508
CCXLVII
509
CCXLVIII
512
CCXLIX
515
CCL
516
CCLI
519
CCLII
520
CCLIV
522
CCLVI
523
CCLVIII
524
CCLIX
525
CCLX
527
CCLXI
531
CCLXII
532
CCLXIII
533
CCLXIV
535
CCLXV
537
CCLXVI
538
CCLXVII
539
CCLXVIII
541
CCLXIX
542
CCLXX
549
CCLXXI
551
CCLXXII
555
CCLXXIII
558
CCLXXIV
560
CCLXXV
563
CCLXXVI
564
CCLXXVII
565
CCLXXVIII
570
CCLXXIX
573
CCLXXX
575
CCLXXXI
576
CCLXXXII
579
CCLXXXIV
580
CCLXXXV
583
CCLXXXVI
585
CCLXXXVII
588
CCXC
589
CCXCII
591
CCXCIV
592
CCXCV
594
CCXCVI
596
CCXCVII
598
CCXCVIII
600
CCXCIX
602
CCC
604
CCCI
605
CCCII
607
CCCIII
608
CCCIV
610
CCCV
611
CCCVI
612
CCCVII
613
CCCIX
617
CCCX
625
CCCXI
635
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