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Interferometric techniques applied in packaged MEMS and MOEMS measurement
Nonlinear resonance effects on thin micro structured aluminum metal gratings by high
Progress of advanced optical manufacturing technology integrated line 614904
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2nd Intl aberration absorption accuracy Advanced Optical Manufacturing angle annealing aspheric lens aspheric surface B-spline calculated Chen China coating coefficient crystal curve defects deformable mirrors density deposition detector devices diffraction effect electrochromic electron equation error experimental fabrication femtosecond femtosecond laser fiber Figure filter function glass grating grinding increase infrared Institute of Optics interface Kley laser layer lens light machining magnetron Manufacturing and Testing mask material measurement mechanical method micro microlens mirror modulation molding obtained optical fiber Optical Manufacturing Technologies optical system optimal output parameters peak photon photoresist plane polarization polishing Proc profilometer properties pyroelectric radius reflectivity refractive index sample scanning sensor shows silicon simulation sol-gel spectra spectrum spherical SPIE Vol structure substrate surface roughness Symp technique temperature Testing Technologies thermal thickness thin films tool transmission transmittance ultra-precision voltage wavefront waveguide wavelength wheel workpiece Xi'an Zhang ZnO films