Device and Process Technologies for MEMS and Microelectronics: 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Front Cover
Kevin Chau, Sima Dimitrijev
SPIE, 1999 - Technology & Engineering - 394 pages
This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.

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