MEMS: Design and FabricationMohamed Gad-el-Hak Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications. |
Contents
MEMS Fabrication | 3-1 |
LIGA and Micromolding | 4-1 |
XRayBased Fabrication | 5-1 |
EFAB Technology and Applications | 6-1 |
Fabrication Characterization and Reliability | 7-1 |
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide | 8-1 |
Materials and Fabrication | 9-1 |
Optical Diagnostics to Investigate the Entrance Length in Microchannels | 10-1 |
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Common terms and phrases
Anisotropic Etching annealing anodic applications aspect ratios atoms beam bonding bulk micromachining cantilever chemical components concentration density deposition devices diaphragm die-attach dielectric diffusion doping EFAB electrical Electrochem electrodeposition electrons electroplated energy epilayer Equation etch rate etch stop etchants fabrication flow Guckel high-temperature hydrogen IEEE integrated isotropic LIGA LPCVD material measured mechanical membrane MEMS metal Micro Microelectromechanical Systems microfabrication microfluidic microstructures mold molecular molecules n-type nickel optical oxide packaging particle pattern photoresist Phys piezoelectric piezoresistive piezoresistors planes plasma plating PMMA poly-Si polyimide polymer polysilicon porous pressure sensor properties reaction Reprinted with permission residual stress resist resistors sacrificial layer Schottky diode semiconductor Sensors and Actuators shown in Figure silicon nitride single-crystal SiO2 Solid-State Sensors solution strain structures substrate surface micromachining Synchrotron techniques tensile thermal thick-film thickness thin films typically wafer X-ray lithography X-ray mask Young’s modulus