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SILIC0N MICR0PROBE FABRICATI0N
M0LYBDENUM AND TUNGSTEN MICR0PROBE FABRICATI0N
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0bviously 0rgan of Corti 50 u thick acoustical stimulation action potential amplitude anisotropic etch annealing auditory nerve auditory prosthesis auditory system axons basilar membrane biologically compatible biostimulation bonding Chapter characteristic frequency chemical cochlea current density deposited diagram eight electrodes electrical stimulation electrode arrays electrode leads electrolysis electrolysis weight loss etch rate etchant experiments final frequency response Growth function hair cells human cochlea hybrid circuit implanted inferior colliculus initial input insulation layer integrated circuit l0 msec latency mask mastoid cavity metals microelectrodes microprobe microprobe design microprobe fabrication middle ear missing pulses molybdenum molybdenum and tungsten multielectrode arrays neural neurons output oxide package photoresist planar photolithographic techniques platinum recording electrode response pattern response seen sensory deafness shown in Figure silicon dioxide silicon microprobes silicon probes solution stapes stimulating electrode stimulation sites STIMULISS substrate surface tests tissue damage titanium tonal tone bursts transducer tungsten underetching voltage wafer