Synthetic Diamond: Emerging CVD Science and TechnologyKarl E. Spear, John P. Dismukes A riveting look at the science, technology and people involved in overcoming early impracticalities of the fledgling chemical vapor deposition (CVD) synthesis method and its development in today's state of commercial readiness. Provides insights into numerous vapor phase techniques. Surveys the synthesis, structure, properties and applications of diamondlike carbon. Details current and rapidly emerging applications, manufacturing and markets. |
Contents
The Vision of Diamond as an Engineered Material | 3 |
Development of LowPressure Diamond Growth in the United | 21 |
Summary of Research on Diamond Growth from the Gas Phase | 41 |
Development of Diamond Science and Technology in Japan | 57 |
Development and Status of Diamondlike Carbon | 91 |
Growth of Diamond by CVD Methods and Effects of Process | 145 |
Vapor Phase Diagnostics in Diamond CVD | 193 |
Mechanisms for CVD Diamond Growth | 243 |
Diamond Electrical Properties and Electronic Device Behavior | 355 |
Optical Properties and Optoelectronic Applications of Diamond | 401 |
Tribology and Wear Behavior of Diamond | 419 |
Industrial Applications of SingleCrystal Diamond | 507 |
Technological Applications of CVD Diamond | 533 |
A Comparative Assessment of CVD Diamond Manufacturing | 581 |
CVD Diamond Markets in the 21st Century | 625 |
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Common terms and phrases
a-SiC absorption acetylene Angus Appl atomic hydrogen band gap boron carbide carbon atoms Chapter chemical chemical vapor deposition cm² coatings coefficient combustion concentration cost crystals CVD diamond dangling bonds defects density deposition rate Deryagin diamond CVD diamond deposition diamond films diamond growth diamond surface diamond synthesis diamondlike Dismukes DLC films doping electrical Electrochemical electron emission energy Fedoseev filament films deposited fluorine Frenklach friction Gardos gas phase graphite growth of diamond growth rate H₂ HAC/TSD heat high temperatures HPHT diamond hydrocarbon increase infrared kinetic laser layer Lett lonsdaleite materials mechanism metal methane microwave microwave plasma Moustakas natural diamond nitrogen nondiamond nucleation optical oxygen parameters PCD films phonon Phys plasma polishing pressure Proc properties of diamond radicals Raman reaction semiconductor Setaka shown in Figure silicon sp² sp³ Spear species Spitsyn structure substrate Synthetic Diamond techniques thermal conductivity torr tribological wear



