Electron Kinetics and Applications of Glow Discharges

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Uwe Kortshagen, Lev D. Tsendin
Springer Science & Business Media, Jun 30, 1998 - Science - 557 pages
This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.
 

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Contents

I
1
II
19
III
37
IV
59
V
75
VI
85
VII
101
VIII
119
XIX
313
XX
329
XXI
349
XXII
367
XXIII
391
XXIV
409
XXV
423
XXVI
441

IX
137
X
161
XI
179
XII
199
XIII
215
XIV
227
XV
241
XVI
257
XVII
283
XVIII
293
XXVII
459
XXVIII
471
XXIX
489
XXX
503
XXXI
511
XXXII
525
XXXIII
531
XXXIV
549
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