Excimer Lasers

Front Cover
L.D. Laude
Springer Science & Business Media, Apr 30, 1994 - Medical - 495 pages
Among the many intense light sources, excimer lasers have a unique set of properties that place them at the forefront of tooling for material processing. Their extreme versatility means that they can be used in many areas of materials science and medicine. But three conditions need to be fulfilled in order that their versatility be truly appreciated and exploited: the characteristics and limitations of the sources must be known; the basic excimer laser processes should become reasonably widely known; and problems in search of a solution should be clearly identified.
Excimer Lasers covers all three of these points in an instructive and logical way. Probably for the first time, both instrumental and fundamental aspects of excimer laser interaction with matter are presented side-by-side, with examples drawn from the widest range of materials.
The articles gathered here are tutorial in their nature, thus making them suitable for a wide readership, from recent graduates and postgraduate students to those established scientists entering the field, all of whom could not find a better, nor more authoritative work with which to start their reading.
 

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Contents

CURRENT STATUS AND FUTURE DEVELOPMENTS
1
INNOVATIVE TECHNOLOGIES OF NEW EXCIMER LASERS
15
MAINTENANCE ISSUES OF EXCIMER LASERS IN A PRODUCTION OR INDUSTRIAL RESEARCH ENVIRONMENT
27
PULSEDLASER ABLATION
39
PHOTOPHYSICAL ABLATION OF ORGANIC POLYMERS
59
DYNAMICS OF THE VAPOR FLUME IN LASER MATERIALS ABLATION
79
SURFACE AND THREEDIMENSIONAL PROCESSING BY LASER CHEMICAL VAPOR DEPOSITION
91
CHEMICAL VAPOR DEPOSITION OF CRYSTALLINE AND AMORPHOUS CARBON SILICON AND GERMANIUM FILMS
103
AN INNOVATIVE HIGH REPETITION RATE SHOT PER SHOT ACQUISITION SYSTEM AND ITS APPLICATION TO A NEW KIND OF TROP...
245
DETECTION OF HEAVY METALS IN ENVIRONMENTAL SAMPLES USING LASER SPARK ANALYSIS
269
APPLICATIONS OF EXCIMER LASER BASED REMOTE SENSING SYSTEMS TO PROBLEMS RELATED TO WATER POLLUTION
289
APPLICATIONS OF LASERS IN MICROELECTRONICS AND MICROMECHANICS
307
EXCIMER LASER FOR IN SITU PROCESSING IN MICROELECTRONICS
319
APPLICATION TO SUBMICRON LITHOGRAPHY
339
FUNDAMENTAL ASPECTS
355
MATERIALS ASPECTS AND APPLICATIONS
371

LASER EXCITATION AND DETECTION OF SURFACE ACOUSTIC WAVE PULSES
121
GAS AND ADSORBEDPHASE UV PHOTOCHEMISTRY OF TETRA METHYLTIN TMT PROBED BY INSITU OPTICAL DIAGNOSTICS AND S...
133
MATERIALS ANALYSIS BASED ON QUANTITATIVE LASER IONIZATION
153
TIMERESOLVED DIAGNOSTICS OF EXCIMER LASERGENERATED ABLATION PLASMAS USED FOR PULSED LASER DEPOSITION
165
EXCIMER LASER INDUCED PERMANENT ELECTRICAL CONDUCTIVITY AND NANOSTRUCTURES IN POLYMERS
187
PHOTOABLATION AND SURFACE MODIFICATION OF POLYMERS WITH THE EXCIMER LASER RADIATION
201
PROCESS OF GENERATING 3DM1CROSTRUCURES WITH EXCIMER LASERS
221
NONCOHERENT STRUCTURE FORMATION ON UVLASER IRRADIATED POLYMERS
237
PULSED EXCIMER LASER CRYSTALLIZATION AND DOPING FOR THE FABRICATION OF POLYSi AND SiGe TFTs
387
POSSIBLE APPLICATION FOR THE RUNNINGIN PART OF THE AUTOMOTIVE MOTORS
403
TRANSIENT STRUCTURAL MODIFICATIONS OF SINTERED COMMERCIAL ALUMINIUM NITRIDE CERAMICS RESULTING FROM LOW ...
411
VIAHOLE DRILLING WITH KRFLASER AS AN EXAMPLE
417
CORONARY ANGIOPLASTY WITH EXCIMER LASER
437
CORNEAL OPTICAL ZONE RESHAPING WITH EXCIMER LASER
447
LASER INDUCED FLUORESCENCE AS A TOOL FOR ATHEROSCLEROTIC TISSUE CHARACTERIZATION DURING EXCIMER LASER AID...
465
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