Semiconductor Manufacturing Technology

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World Scientific Publishing Company, Mar 3, 2008 - Technology - 484 pages
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
 

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Contents

1 OVERVIEW
1
2 BUILDING BLOCKS FOR INTEGRATED CIRCUITS
38
3 THERMAL OXIDATION
63
4 GAS KINETICS AND PLASMA PHYSICS
97
5 CHEMICAL VAPOR DEPOSITION
128
6 PLASMAENHANCED CHEMICAL VAPOR DEPOSITION AND ETCHING
168
PHOTOLITHOGRAPHY
212
8 PATTERN GENERATION
260
9 DOPING TECHNOLOGY
304
10 METALLIZATION AND SILICIDATION
338
11 PLANARIZATION AND CMP TECHNOLOGY
378
12 COPPER AND LOWk
411
GLOSSARY
440
REFERENCES
453
INDEX
465
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About the author (2008)

Chue San Yoo (Former Associate Professor at Tamkang University & National Tsing Hua University, Taiwan)

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