Defect Engineering in Semiconductor Growth, Processing, and Device Technology: Symposium Held April 26-May 1, 1992, San Francisco, California, U.S.A.

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S. Ashok, J. Chevallier, E. Weber, K. Sumino
Materials Research Society, 1992 - Technology & Engineering - 1144 pages
Proceedings of the San Francisco meeting of April-May 1992. Papers emphasize deliberate and controlled introduction and manipulation of defects in order to engineer some desired properties in semiconductor materials and devices. Topics include: defects in bulk crystals, and in thin films; defect characterization; hydrogen interaction; processing induction of defects; quantum wells; ion implantation. Annotation copyright by Book News, Inc., Portland, OR

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Contents

DYNAMIC BEHAVIOR OF INTRINSIC POINT DEFECTS IN FZ AND
3
PRESENT STATUS
15
AN INVESTIGATION OF VACANCY CONCENTRATIONS IN BULK SILICON
31
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