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Z4 GroupType Unidirectional Transducers at SAW RESONATORS AND SENSORS
Z6 LowLoss Low Spurious Reflective Dot Array W R Shreve R C Bray S Elliott
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A1N films aluminum amplitude angle annealing applications attenuation Ballato bandwidth beam berlinite bulk wave calculated capacitance center frequency chirp circuit components configuration convolver crystal curves delay line detector dielectric diffraction dispersion effect elastic electrical electrodes experimental fabricated field Figure filter frequency response function harmonic IEEE IEEE Trans IEEE Ultrasonics input insertion loss interdigital transducers Lamb wave layer linear lithium niobate magnetic matching measured metal microwave mode modulation nonlinear obtained optical orientation output parameters passband performance phase phase velocity Phys piezoelectric plate Proc properties pulse quartz range ratio Rayleigh wave reflection reflection coefficient rotated sample SAW devices SAW oscillator SAW resonator shown in Fig shows signal Sonics sputtering strip structure substrate substrate temperature surface acoustic wave surface wave technique theoretical thickness tion TOE constants transducer Ultrasonics Symposium velocity voltage waveform waveguide wavelength width ZnO films