Theoretical and Practical Limits of Measurement Accuracy: 2nd Symposium of the IMEKO Technical Committee on Metrology--TC8 : Proceedings |
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Page 120
... EDGE INDICATORS by K. Karovic , M. Keppert Czechoslovakia . Schedewie [ 1 ] proposed two kinds of laser spots edge indica- tors for IC masks structure measurements . The edge is scanned by two or three laser beam waists . Radii of beam ...
... EDGE INDICATORS by K. Karovic , M. Keppert Czechoslovakia . Schedewie [ 1 ] proposed two kinds of laser spots edge indica- tors for IC masks structure measurements . The edge is scanned by two or three laser beam waists . Radii of beam ...
Page 121
... edge to be irradiated with the irradiance intensity ( 1 ) on the surface S. The luminous flux reflected from the edge with the reflection coefficient r ( x , y ) is ( 2 ) F = ާ h ( x , y ) r ( x , y ) dxdy . ( 3 ) S If we consider the ...
... edge to be irradiated with the irradiance intensity ( 1 ) on the surface S. The luminous flux reflected from the edge with the reflection coefficient r ( x , y ) is ( 2 ) F = ާ h ( x , y ) r ( x , y ) dxdy . ( 3 ) S If we consider the ...
Page 127
... edge may be static . The edge motion velocity is not limited by chopping that is omitted . One of the disadvantages is possible occurence of systematic error in complementary edges position measurements . This , at first sight a rather ...
... edge may be static . The edge motion velocity is not limited by chopping that is omitted . One of the disadvantages is possible occurence of systematic error in complementary edges position measurements . This , at first sight a rather ...
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acceleration accuracy algorithm amplifier amplitude analysis ASMW BIPM bolometer buffer solution calculated calibration calorimeter coaxial transmission lines coefficient Comecon comparison components of error density detector determined edge effect electrical electronic equation error function estimation experimental factor fluctuations frequency given Hungary influence quantities intercomparison interferometer interval ionization laboratory laser line standards linear luminous fluxes maximum means measurand measure-sets measurement conditions measurement results measurement uncertainty measuring devices measuring instruments ment meter method metrological microcalorimeter noise normal obtained operation output parameters power standard precision pressure primary standard problem procedure pseudonoise quantization quantum random errors range ratio realized reference relative resonant system samples sensitivity signal stability standard deviation systematic error Table temperature theoretical thermal thermodynamic temperature tion transfer standards uncertainty components unit USSR vacuum gauge variance viscometer viscometer constants viscosity VNIIM voltage X-ray