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according accuracy activity algorithm analysis applied beam calculated calibration caused chamber characteristics coefficient compared comparisons components concentration considered constant correction defined definition density depends described detection determined direct distribution edge effect electrical electronic equation error estimation expressed factor failures field frequency function given improvement increase interferometer ionization Italy known laboratory laser leads limits mass means measurand measurement measuring devices measuring instruments method metrological noise normal obtained operation parameters performed phase physical position possible practical precision present pressure primary standard probability problem procedure quantities random range ratio realized reference relation relative requirements resonant respectively response samples sensitivity shows signal stability standard deviation systematic Table temperature theoretical thermal tion transfer uncertainty unit vacuum gauge vibration viscosity voltage