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Integrated microoptical systems 328902
Compact selfaligning assemblies with refractive microlens arrays made by contactless
Highpowered laser diode transmitter with integrated microlens for fast axis collimation
13 other sections not shown
achieved active actuator adhesive alignment angle applications approach array assembly attached axis beam bonding calculated cell chip circuit components concentrator connector conventional correlator cost coupling deposited described detector developed device diameter diffractive display effect efficiency electrical electronic elements etch fabrication fiber filter focal length force function glass imager increasing integrated laser diode layer LCOS lens lenses LIGA light loss manufacturing material measured mechanical method micro-optical microlens microns mirror module molding mounting operation optical output package passive pattern performance pixel polymer position precision produce range reduced reflective refractive resist Scan shape shown in figure shows silicon simulator solder spacer stage standard step structure substrate surface surface tension techniques temperature thermal thickness thin tolerances tool transmission VCSEL wafer waveguide wavelength width