MOEMS 99: Proceedings : 3rd International Conference on Micro Opto Electro Mechanical Systems, Optical MEMS : August 31 - September 1, 1999, Mainz Hilton, Mainz, Germany |
Common terms and phrases
achieved actuator adaptive optics air gap alignment amplitude aperture applied voltage beam cantilever cavity chip coating collimated components coupling deformation deposited detector device diameter displacement electrical Electro Mechanical Systems electrode electrostatic etching Fabry Perot Figure hinge IEEE infrared input insertion loss integrated interconnection interface interferometer laser lens array light linear lithography mask material matrix switch measured MEMS Micro Opto Electro micro SLM micro-optical microlens microlens arrays microoptical microsystems mirror plate module MOEMS MOEMS 99 networks optical coating optical fiber optical switch Opto Electro Mechanical output oxide packaging photodiode photoresist piezoelectric piezoelectric actuator pixel plasma Hall PMMA polysilicon prism Proc range reflectivity refractive index resonant frequency sacrificial layer scanner scanning Schematic shown in Fig shows signal silicon waveguide SiO2 slider SNOM sol-gel structure substrate surface micromachining technique temperature thickness thin film torsional transmission V-grooves voltage wafer wavelength