The MEMS Handbook
CRC Press, Sep 27, 2001 - Technology & Engineering - 1368 pages
The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS.
The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
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Background Summary and Conclusions
Burnett Simulations of Flows in Microdevices Ramesh K Agarwal
Lubrication CouetteFlow Damping SqueezeFilm Damping Lubrication
Physics of Thin Liquid Films Alexander Own 101
BubbleDrop Transport in Microchannels HsuehChia Chang 111
Fabrication and Characterization of SingleCrystal Silicon Carbide MEMS
Microfabricated Chemical Sensors for Aerospace Applications
Chester Wilson and Yogesh B Gianchandani 251
Sensors and Actuators for Turbulent Flows Lennart Lofdahl and Mohamed GadelHak 261
SurfaceMicromachined Mechanisms Andrew D Oliver and David W Plummer 271
Packaging of HarshEnvironment MEMS Devices LiangYu Chen
Microrobotics Thorbjorn Ebefors and Goran Stemtne 281
Microscale Vacuum Pumps E Phillip Muntz and Stephen E Vargo 291
Fundamentals of Control Theory Bill Goodwine 121
ModelBased Flow Control for Distributed Architectures Thomas R Bewley 131
ModelBased Flow Control for Distributed
Soft Computing in Control Mihir
and KeonYoung Yun
n Design and Fabrication
Materials for Microelectro mechanical Systems Christian A Zorman
MEMS Fabrication Marc J Madou 161
Inertial Sensors Paul L Bergstrom and Gary G Li 241
Electrochemical Fabrication EFAB Adam L Cohen 191
MolecularBased Microfluidic Simulation Models Ali Beskok
Microdroplet Generators FanGang Tseng 301
Soft Computing in Control Mihir Sen Bill Goodwine 141
Micro Heat Pipes and Micro Heat Spreaders G P Bud Peterson 311
MicroChannel Heat Sinks Yitshak Zohar 321
Flow Control Mohamed GadelHak 331
Reactive Control for SkinFriction Reduction Haecheon Choi 341
Fabrication Technologies for Nanoelectromechanical Systems Gary H Bernstein Holly V Goodson and Gregory L Snider 361
algorithm anisotropic applications approach beam Boltzmann Boltzmann equation boundary conditions bubble bulk micromachining Burnett equations capillary channel coefficient components computational density deposition developed devices doped DSMC dynamics effects electric Electrochem electronic energy etch rate etchants evaporation fabrication feedback flow Fluid Mech forces function fuzzy fuzzy set geometry gradient Guckel heat IEEE interface Knudsen number layer LIGA linear liquid films lithography LPCVD Madou mask material measured membrane MEMS metal method Micro microchannels microelectromechanical systems microfluidic microstructures mold molecular molecules Navier-Stokes equations nitride nonlinear optimization oxide parameters pattern photoresist Phys planes plate PMMA poly-Si polyimide polysilicon potential pressure problem ratio resist sacrificial scale Sensors and Actuators shown in Figure silicon silicon nitride simulation solid Solid-State Sensors solution stability stress structures substrate surface micromachining techniques temperature tensile thermal thickness Thin Films turbulent typical velocity viscous wafer X-ray X-ray lithography Young's modulus
Page 3-25 - The US Government is authorized to reproduce and distribute reprints for Governmental purposes notwithstanding any copyright annotation thereon.
Page v - Hekinah degul : the others repeated the same words several times ; but I then knew not what they meant. I lay all this while, as the reader may believe, in great uneasiness. At length, struggling to get loose, I had the fortune to break the strings, and wrench out the pegs that fastened my left arm to the ground ; for by lifting it up to my face, I discovered the methods they had taken to bind me, and, at the same time, with a violent pull, which gave me excessive pain, I a little loosened the strings...
Page v - In a little time I felt something alive moving on my left leg, which, advancing gently forward over my breast, came almost up to my chin ; when, bending my eyes downward as much as I could, I perceived it to be a human creature not six inches high, with a bow and arrow in his hands, and a quiver at his back.
Page v - These people are most excellent mathematicians, and arrived to a great perfection in mechanics by the countenance and encouragement of the emperor, who is a renowned patron of learning.
Page 3-27 - Gupta, RK, Osterberg, PM, and Senturia, SD (1996) "Material Property Measurements of Micromechanical Polysilicon Beams," Proc. SPIE 2880, pp. 39-45. Hoffman, RW (1989) "Nanomechanics of Thin Films: Emphasis, Tensile Properties...