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Small excimers opening up new industrial applications 299202
Performance characteristics of a highenergy highpulse repetition frequency krypton
Coaxial cylindrical and planar UV excilamps pumped by glow or barrier discharge 299204
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ablation rate absorption annealing aperture Appl applications burst carbon fibres ceramics chamber coating components conventional cost damage dependence deposition depth diameter droplets effects efficiency electron energy energy density etching excilamp excimer laser fibres Figure films fluence formed geometry glass glow discharge gratings higher hole improved increases industrial intensity irradiation laser ablation laser beam laser pulse layer lens less limited lines lithography machining manufacturing mask materials measured mechanism method mirrors mixture observed obtained operating optical output output power ozone parameters pattern Phys polymer presented produced properties pulse energy radiation range removal repetition rate Research resin resist sample semiconductor shown shows silica solid structures studies substrate surface techniques thickness thin threshold tube typical wavelength workpiece XeCl