Principles of Vapor Deposition of Thin Films
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.
Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.
* Offers detailed derivation of important formulae.
* Thoroughly covers the basic principles of materials science that are important to any thin film preparation.
* Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.
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adatom adsorbed adsorption alloys angle anode assume atoms bombardment Calculate cathode chamber charged particles chemical chemical potential cluster coefficient collisions condensation constant cross section crystal current density depends deposition diffraction diffusion direction discharge dislocation distance elastic collisions electric field electron beam emission epitaxial equation equilibrium Example Figure flow flux formation frequency function gases Gibbs free energy given grain growth heat Hence impurities incident increases interaction interface ionization kinetic energy laser lattice layer magnetic field mass material mean free path metal misfit molecular molecules monolayer motion neutral nucleation number of molecules obtain occurs oxide phase Phys plane plasma potential energy pump reaction region scattering semiconductor sheath shown in Fig silicon solid sputtering yield sticking coefficient structure substrate superconductors target temperature thermal thickness thin film typically vacuum valence band vapor pressure velocity voltage wave
Page 58 - I believe it is the atomic hypothesis (or the atomic fact, or whatever you wish to call it) that all things are made of atoms — little particles that move around in perpetual motion, attracting each other when they are a little distance apart, but repelling upon being squeezed into one another.