Technology of Integrated Circuits
Springer Science & Business Media, Mar 9, 2013 - Technology & Engineering - 342 pages
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
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aluminium anisotropically annealing aperture areas arsenic bipolar transistors boron BPSG buried layer capacitor charge chip CMOS concentration contact holes Cross-section density dielectric diffusion dopant dopant atoms doping dose dry etching edge electrical electron beam epitaxial layer etch rate etching process exposure field oxide gases gate oxide integrated circuits intensity interconnects interface ion beam ion implantation last process step lens lithography LOCOS memory cell monocrystalline monocrystalline silicon MOS transistors nitride oxygen p-channel particles PECVD phosphorus phosphorus glass Photolithography Photolithography using mask Photoresist etching photoresist mask planarization plasma poly-Si polycide polyimide polysilicon process sequence process step described produce reactive ion etching reactor regions remove the photoresist resist thickness reticle shown in Fig silicide silicon wafer SiO2 anisotropically SiO2 deposition SiO2 etching SiO2 film SiO2 layer spacer spin-on glass sputtering substrate Table temperature thermal oxidation thin tion trench voltage wafer surface wavelength whilst X-ray