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BolometerType Infrared Sensors Fabricated by Plasmaless Dry Etching S M 0557
Piezoelectric Composites of Fine PZT Rods Realized by LIGA Process S M 0558
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acid adsorbed adsorption analysis anodic applied array biomolecules biotinylated bonding buffer solution calcein calcein release cantilever beams capacitance cell Chem chemical concentration concrete corrosion creatinine density detection devices dielectric constant drop head electrical enzyme Enzyme-1 etching experimental fabricated ferroelectric Figure fluorescence GluRS gold hydrophobic IEEE immobilized ion implantation Japan layer light signal lipid liposomes liquid drop lysozyme lytic enzyme measured membrane metal methanol method mg/ml Micrococcus luteus microcolumn electrodes mixture molecules MYU Tokyo nanotubes obtained optical fiber Osaka oxide patterning phosphate phospholipid planar electrodes poly-Si polysilicon polysilicon film porous postdeposition annealing PPy films probe protein PST films Research resistance response sample sensing sensitivity sensor Sensors and Actuators Sensors and Materials shown in Fig shows silicon solution spectral stress gradient structure surface Technology temperature thickness thiol thiol-SAM-Cu particles University urea urease voltage Volume wafer wavelength