Hydrogen in Compound Semiconductors

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S. J. Pearton
Trans Tech Publications, 1994 - Compound semiconductors - 535 pages
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State-of-the-art reviews on all the major areas of interest are brought together in this book, namely the role of hydrogen during epitaxial growth, its entry into the material during processing, its subsequent diffusivity and bonding with dopants, other impurities or defects, its effect on device performance and reliability and positive uses for hydrogen in passivating surfaces.

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The Role of Hydrogen in UHV Growth of IIIV Semiconductors
The Role of Hydrogen in the Growth of IIIV Compound
Role of Hydrogen in Semiconductor Dielectric and Metal Deposition

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