Laser assisted processing: ECO1, 19-20 September 1988, Hamburg, Federal Republic of Germany : proceedings
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HIGH PRECISION LASER MACHINING
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ablation absorption Appl applications beam quality carbon chemical chemical vapor deposition chlorine compound cut edge Cutting Speed deposition rate depth electron endcap energy density epitaxial etching excimer laser experimental Figure films fluence focused fuse GaAs gauge factor geometry heat affected zone high power higher increase influence intensity distribution interaction irradiation laser beam laser cutting laser fluence laser irradiation laser power laser processing laser pulse laser radiation sources laser source laser spot laser-induced layer m/min manufacturing martensite materials processing mbar measured mechanical melting metal Micro Machining mode modulation obtained optical oxide phase photoablation photodiode Phys pigtail plasma polarization polymer power density pressure processing parameters processing with laser properties pulsewidth reaction reflected samples scanning shape sheet thickness shows silicide silicon solder solder joint spot diameter steel sheets stoichiometry stripes substrate superpulsed technique thermal threshold tion values vapor wavelength welding