Charged-particle Optics, Volume 1SPIE, 1993 - Electron optics |
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Page 63
... distribution and the Lambert distribution ( the cosine law ) . The points stand for the electron positions from the ... density . The beamlets form the crossover in the axial ( lateral ) direction at different positions . Figure 6 shows the ...
... distribution and the Lambert distribution ( the cosine law ) . The points stand for the electron positions from the ... density . The beamlets form the crossover in the axial ( lateral ) direction at different positions . Figure 6 shows the ...
Page 100
... density in the vicinity of the emitting surface is quite high , so that the anormalous energy spread could be ... distribution on the cathode surface can be calculated from Fowler- Nordheim equation by using the electric field distribution ...
... density in the vicinity of the emitting surface is quite high , so that the anormalous energy spread could be ... distribution on the cathode surface can be calculated from Fowler- Nordheim equation by using the electric field distribution ...
Page 159
... density distribution B ( x , y , z ) only approximately , causes apparently no changes to the second and third terms in Eq . ( 2 ) that modify the aberrations proportional to y2 and to yb . It changes , however , the first term in Eq ...
... density distribution B ( x , y , z ) only approximately , causes apparently no changes to the second and third terms in Eq . ( 2 ) that modify the aberrations proportional to y2 and to yb . It changes , however , the first term in Eq ...
Contents
Snorkeltype conical objective lens with E cross B field for detecting secondary electrons | 17 |
New developments in personal computer software for accelerator simulation and analysis | 24 |
Computer simulation of electron optical characteristics of accelerating tube for highvoltage | 36 |
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aberration accelerating accelerating voltage analysis angle aperture application axial axis calculated cathode changes charge chromatic aberration coefficients column combined condition correction current density deflection depends detector determined developed direction distance distribution effect electric electrostatic element emission emitted energy equation error evaluated example extraction system Figure filter finite focusing function geometry given grid important improved increase input integrated interpolation ion beam length lens lenses limit lithography magnetic field magnification mass merit mesh method mode objective obtained operation optical optimization parameters particle performance plane plasma position possible potential primary problem produced properties range ray tracing region resolution respectively sample secondary electrons separation shown shows side simulation space SPARC specimen spherical surface tool trajectories transport tube vector voltage