Charged-particle Optics, Volume 1SPIE, 1993 - Electron optics |
Contents
Snorkeltype conical objective lens with E cross B field for detecting secondary electrons | 17 |
New developments in personal computer software for accelerator simulation and analysis | 24 |
Computer simulation of electron optical characteristics of accelerating tube for highvoltage | 36 |
Copyright | |
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Common terms and phrases
aberration accelerating accelerating voltage analysis angle aperture application axial axis calculated cathode changes charge chromatic aberration coefficients column combined condition correction current density deflection depends detector determined developed direction distance distribution effect electric electrostatic element emission emitted energy equation error evaluated example extraction system Figure filter finite focusing function geometry given grid important improved increase input integrated interpolation ion beam length lens lenses limit lithography magnetic field magnification mass merit mesh method mode objective obtained operation optical optimization parameters particle performance plane plasma position possible potential primary problem produced properties range ray tracing region resolution respectively sample secondary electrons separation shown shows side simulation space SPARC specimen spherical surface tool trajectories transport tube vector voltage