Charged-particle Optics, Volume 1SPIE, 1993 - Electron optics |
Contents
Snorkeltype conical objective lens with E cross B field for detecting secondary electrons | 17 |
New developments in personal computer software for accelerator simulation and analysis | 24 |
Computer simulation of electron optical characteristics of accelerating tube for highvoltage | 36 |
Copyright | |
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Common terms and phrases
aberration coefficients accelerating voltage analysis angle anode aperture application axial beam current calculated cathode chromatic aberration crossover current density deflection deflector depth of field detector diameter dynamic corrections dynode effect electric field electron beam electron beam lithography electron optical electrostatic field electrostatic lens energy spread equation error ExB filter extraction system extraction voltage FEM potentials FIB column field distribution field emission figure of merit finite element focused ion beam fringing field function geometry grid spacing input integrated interpolation ion source Laplace equation lenses limit lithography magnetic field magnification mask mass separator mesh method mode mrad NEDlab objective lens optical axis optical system optimization parameters plasma pole piece position primary beam quadrilateral quadrupole ray tracing ray-tracing region resolution sample scanning SCM-code secondary electrons simulation SOEM SPARC specimen spectrometer spherical aberration spot surface Technol TRACE 3-D transport lens tube Vacc vector