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Snorkeltype conical objective lens with E cross B field for detecting secondary electrons
New developments in personal computer software for accelerator simulation and analysis
Computer simulation of electron optical characteristics of accelerating tube for highvoltage
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aberration coefficients accelerating voltage analysis angle anode aperture application axial beam current calculated cathode chromatic aberration crossover current density deflection deflector density distribution depth of field detector diameter dynamic corrections dynode effect electric field electron beam electron beam lithography electron optical electrons emitted electrostatic field electrostatic lens energy spread equation error evaluated ExB filter extraction system extraction voltage FEM potentials FIB column field distribution field emission figure of merit finite element focused ion beam fringing field function geometry grid spacing input integrated interpolation ion source Laplace equation lenses limit lithography magnetic field magnification mask mass separator mbar mesh mode mrad NEDlab objective lens optical axis optical system optimization parameters plasma pole piece position primary beam quadrilateral quadrupole ray tracing ray-tracing region sample scanning SCM-code secondary electrons simulation SOEM SPARC specimen spherical aberration spot Technol TRACE 3-D transport lens tube vector