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accuracy active optics actuator air bearing aluminum amplitude angle angular applications arc seconds assembly axial beam cables calibration centrifuge chopping coarse encoder coefficients compensation components configuration crossing velocity cycling deflection detector diameter disk displacement distortion drive dynamic Engineering equation error error band filter finite element flexure force frequency galvanometer gear gimbal grade MMC Gray code hysteresis inch inner axis laser limited linear linear motor linking-center line load loop machine main axis matrix measured mechanical method MMC materials motion motor mounted opto-mechanical instrument outer axis output parameters performance photodiodes plate position precision predicted pulse resonant scanners rotating scan secondary mirror servo shaft shown in Figure signal silicon carbide slip ring solar furnace SPATE stability stepper motor stiffness strain strain gauge structure surface technique telescope temperature thermal thermoelastic stress analysis torque track variation vibration waveform Zernike polynomial Zerodur