Handbook of Ion Sources

Front Cover
CRC Press, Aug 31, 1995 - Technology & Engineering - 560 pages
The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application.
The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources.
The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies.
Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized.
The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques.
 

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Contents

Introduction
2
Chapter
10
Magnetic Field Effects
16
Characteristics of Ion Sources
23
Chapter 3
114
INTRODUCTION
319
Production of Ions from Nongaseous Materials
331
Chapter 4
351
Beam Formation and Transport
365
Ion Beam Diagnosis
385
Ion Source Electronics and Microwave Generators for Ion Sources
453
Computer Codes
519
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