Specialty Gas Analysis: A Practical GuidebookJeremiah D. Hogan The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields. |
Contents
Humidity Measurement in Gases for Semiconductor | 21 |
The Chromatographic Analysis of Trace | 43 |
Ultrapure Sampling of CorrosiveGas Cylinders | 81 |
Copyright | |
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Common terms and phrases
absorption acid gas adsorbed ammonia Anal analyzer APIMS argon arsine atmospheric baseline blank determinations bubbler calculated calibration data carbon carrier gas cell Chem chromatographic components contamination corrosive gases cylinder detection limits dilution discharge ionization detector electrodes eluent elutes flow rate frost-point gas analysis gas chromatograph gas sampled H₂ HayeSep helium helium ionization detector HID/DID hydrogen hydrogen chloride hygrometers ICP-MS impurities injection instrument ionization detector ionization potential IUPAC laser liquid LOD determination LODIUPAC LODPOE LODREG LODS/N mass spectrometer matrix metal methane method LOD mixture ml/min moisture analysis moisture concentration molecular sieve molecular sieve column N₂ nitrogen number of blanks oxide oxygen peak porous polymer pressure purge range sample gas sample line sample loop semiconductor sensitivity sensor separation shown in Figure signal silane solution specification spectroscopy stainless steel standard deviation statistical surface TDLAS technique temperature tion trace tube valve vapor zero