Specialty Gas Analysis: A Practical Guidebook
Jeremiah D. Hogan
Wiley, Dec 27, 1996 - Science - 200 pages
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.
11 pages matching mass spectrometer in this book
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Humidity Measurement in Gases for Semiconductor
The Chromatographic Analysis of Trace
Ultrapure Sampling of CorrosiveGas Cylinders
8 other sections not shown
absorption acid gas adsorbed ammonia Anal analyzer APIMS argon arsine atmospheric baseline blank determinations bubbler calculated calibration data carrier gas cell Chem chloride chromatographic components contamination corrosive gases cylinder detection limits dilution discharge ionization detector electrodes eluent elutes false detect flow rate frost-point gas analysis gas chromatography gas sampled HayeSep Helium Ionization Detector HID/DID hydrogen hydrogen chloride hygrometers ICP-MS impurities injection instrument ionization detector IUPAC laser liquid LOD determination LODpoe LODREG LODs/N mass spectrometer matrix metal methane method LOD mixture ml/min moisture analysis moisture concentration molecular sieve molecular sieve column nitrogen number of blanks oxide oxygen peak porous polymer ppbv pressure purge range sample gas sample line sample loop semiconductor sensitivity sensor separation shown in Figure signal silane solution specification spectroscopy stainless steel standard deviation statistical surface Table TDLAS technique temperature tion trace trap tube valve vapor wet test meter zero