Measurement technology and intelligent instruments VI

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Trans Tech Publications Ltd., 2005 - Technology & Engineering - 768 pages
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The topics covered include measurements for advanced materials, micro and nano measurement, biomedical and environmental measurement, optical precision measurement, form error, displacement and angle measurement, on-line and in-process measurement, micro and nano surface metrology, flow and thermal measurement, sensing systems, mechanical and physical quantity measurement, data, signal and image processing for precision measurement: covering novel designs and techniques in sensor and sensing systems and investigations of the characteristics and performances of precision sensor and sensing systems. The book presents the newest information, for application by active researchers and engineers, and forms the basis for further research in this field which is aimed at creating new and practical instrument systems and processes possessing enhanced functionality, precision and performance; all at reduced cost.

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Laser Scattering Measurement of Microdefects on Silicon Oxide Wafer
An Embedded FBG Sensor for Dynamic Strain Measurement for a Clamped
Investigation of Nonisothermal Crystallization Behaviors of Poly and Silica

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