Micro-optics/micromechanics and Laser Scanning and Shaping: 7-9 February 1995, San Jose, CaliforniaM. Edward Motamedi, Leo Beiser |
Contents
J A Cox J D Zook T R Ohnstein Honeywell Technology Ctr D C Dobson Texas | 3 |
88 | 14 |
Fabrication of microoptics by microjet printing 238311 | 110 |
Copyright | |
17 other sections not shown
Common terms and phrases
agile beam steerer alignment angle aperture applications axial axis Bessel beam calculated cavity collimated components coupling efficiency cylindrical deflector developed device diameter diffraction grating diffractive element diffractive optics diode laser disk electronic electrostatic emitter encoder error etch fabrication Fabry-Pérot interferometer fiber lens field focal length frequency function Gaussian beam integrated intensity interferometer laser beam laser diode layer lens array lens spacing lenses lenslet light linear mask measured mechanical micro-optical microbeam microlens microlens arrays micromirror micromotor microns microscanner mirror mode modulation objective lens optical elements optical fiber optical scanner output package parameters pattern performance phase photoresist piezoelectric plane plate polarization polysilicon position reflected refractive resonant rotation semiconductor Sensors and Actuators shown in Figure signal silicon SPIE spot structure substrate surface micromachining tapered fiber technique temperature thermal thickness thin film trap voltage wafer wavefront waveguide wavelength width