MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems: Technical Digest : Orlando, Florida, USA, January 17-21, 1999

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This proceeding focuses on the analysis, design, fabrication, operation, & application of millimeter-scale or smaller electromechanical systems (MEMS). The papers discuss contemporary research on these various aspects of MEMS. Sensors, actuators, & systems design problems, test results, & progress is reported. Partial Contents: Applied Devices; Optical Applications; Applied Devices; Fluids; Fabrication Technologies; Packaging Technologies; Actuators; Design & Modeling; Integrated Technologies; Material Properties

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