S. M. Sze - Technology & Engineering - 1983 - 654 pages
This is a superb state-of-the-art collection of contributed readings by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
J.M. Walls, Robin Smith - Science - 2013 - 196 pages
This volume provides a comprehensive and up to the minute review of the techniques used to determine the nature and composition of surfaces. Originally published as a special ...