Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties, and Applications
Stuart Irvine, Peter Capper
John Wiley & Sons, Oct 7, 2019 - Technology & Engineering - 584 pages
Systematically discusses the growth method, material properties, and applications for key semiconductor materials
MOVPE is a chemical vapor deposition technique that produces single or polycrystalline thin films. As one of the key epitaxial growth technologies, it produces layers that form the basis of many optoelectronic components including mobile phone components (GaAs), semiconductor lasers and LEDs (III-Vs, nitrides), optical communications (oxides), infrared detectors, photovoltaics (II-IV materials), etc. Featuring contributions by an international group of academics and industrialists, this book looks at the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring. It covers the most important materials from III-V and II-VI compounds to quantum dots and nanowires, including sulfides and selenides and oxides/ceramics.
Sections in every chapter of Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications cover the growth of the particular materials system, the properties of the resultant material, and its applications. The book offers information on arsenides, phosphides, and antimonides; nitrides; lattice-mismatched growth; CdTe, MCT (mercury cadmium telluride); ZnO and related materials; equipment and safety; and more. It also offers a chapter that looks at the future of the technique.
Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications is an excellent book for graduate students, researchers in academia and industry, as well as specialist courses at undergraduate/postgraduate level in the area of epitaxial growth (MOVPE/ MOCVD/ MBE).
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ZnO and Related Materials
Fundamental Aspects of MOVPE 19
Phosphides Arsenides and Antimonides
Metamorphic Growth and Multijunction IIIV Solar Cells
Some Techniques for the MOCVD Growth of ZnO and Related Materials
Crystal Growth of ZnO and Related Materials
Epitaxial Systems for IIIV and IIINitride MOVPE
Ultrapure MetalOrganic Precursors for MOVPE