Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films

Jeffrey B. Fortin, Toh-Ming Lu

Springer Science & Business Media, Nov 30, 2003 - Science - 102 pages

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.
This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

Contents

• INTRODUCTION: 1
• 2 Polymerization Mechanisms: 2
• 4 Parylene Family Polymers: 4
• DEPOSITION EQUIPMENT: 9
• 2 Vacuum Systems: 11
• 41 Determining the pumping speed and flow rate: 12
• 42 Calculating the residence time: 14
• 5 Mass Spectrometry for insitu Chemical Analysis and Process MonitoringControl: 15
• 6 Substrate Holders and Temperature Control: 16
• 7 SystemtoSystem Variations: 17
• 8 Example Deposition System: 18
• 9 Commercially Available Deposition Systems and Coating Services: 21
• STEPBYSTEP GUIDE TO DEPOSITING PARYLENE: 23
• 3 Depositing a Film: 24
• PARYLENEN PRECURSOR CHEMISTRY: 27
• 11 Thermodynamics: 28
• 12 Dimer purity: 29
• 13 Mass Spectrometer Fragmentation Pattern: 33
• 21 Thermodynamics: 34
• 22 Mass Spectrometer Fragmentation Patterns: 36
• 3 DimertoMonomer Conversion: 37
• DEPOSITION KINETICS FOR POLYMERIZATION VIA THE GORHAM ROUTE: 41
• 3 Identifying the Control Type: 42
• 4 Identifying the Control Type for Parylene CVD: 43
• 41 The Effect of Temperature on Deposition Rate: 44
• 42 The Effect of Pressure on Deposition Rate: 45
• 5 Kinetic Modeling of Parylene Thin Film Growth: 46
• 52 The Chemisorption Model: 48
• 6 Conclusion: 55
• FILM PROPERTIES: 57
• 3 Cystallinity: 60
• 4 Thermal Stability: 61
• 5 Chemical Properties and Biocompatibility: 62
• 6 Properties and Measurement Techniques for ParyleneN Films: 63
• 62 Mechanical Properties: 64
• 63 Optical Properties: 65
• 64 Surface Morphology: 66
• 65 Thermal Stability of ParyleneN: 70
• 66 Summary: 76
• 7 UV Degradation: 77
• OTHER CVD POLYMERS: 83
• 22 Polynaphthalene Film Properties: 87
• 3 Polyimides: 88
• 4 Polytetrafluoroethylene Family: 89

Popular passages

Page 97 - Electrical Degradation and Breakdown in Polymers", Peter Peregrinus Ltd., London, UK, 1992 [2] A. Bulinski, S. Bamji, J. Densley, A. Gustafsson and U. Gedde, "Water Treeing in Binary Linear Polyethylene Blends".‎

Page 98 - JG Speight, P. Kovacic, and FW Koch, J. Macromol. Sci. Revs. Macromol. Chem., C5(2), 295(1971).‎

Bibliographic information

• Title: Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films
• Authors: Jeffrey B. Fortin, Toh-Ming Lu
• Edition: illustrated
• Publisher: Springer Science & Business Media, 2003
• ISBN: 1402076886, 9781402076886
• Length: 102 pages
• Subjects: Science / Chemistry / Industrial & Technical; Science / Physics / Condensed Matter; Science / Physics / General; Technology & Engineering / Materials Science