Fundamental Aspects of Plasma Chemical Physics: Kinetics

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Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries.

The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.

 

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Contents

1 ElectronMolecule Collision Cross Sections and Rate Coefficients
1
2 Reactivity and Relaxation of RoVibrationally Excited Molecules
31
3 Atom Recombination at Surfaces
57
4 Kinetic and Monte Carlo Approaches to Solve Boltzmann Equation for eedf
79
5 Superelastic Collisions and Electron Energy Distribution Function
113
6 CollisionalRadiative Models for Atomic H Plasmas
143
7 Vibrational Kinetics
174
8 Particle Models for Low Pressure Plasmas
205
The Nitrogen Case
223
10 Negative Ion H for Fusion
247
11 Non Equilibrium Plasma in High Enthalpy Flows
274
The CO2 Case Study
305
Index
313
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About the author (2015)

Mario Capitelli, University of Bari, mario.capitelli@ba.imip.cnr.it

Gianpiero Colonna, IMIP CNR

Fabrizio Esposito, IMIP CNR

Khaled Hassouni, Institut Galilee-Univeriste Paris

Annarita Laricchiuta, IMIP CNR

Savino Longo, University of Bari