Physics of Nonmetallic Thin Films

Front Cover
Springer Science & Business Media, Dec 6, 2012 - Science - 510 pages
For several years now the intense development in the field of microelectronics, the interest in coating materials, and activity in integrated optics have produced many advances in the field of thin solid filmg~ The research activity has become so intensive and so broad that it is necessary to divide the field into metallic and non metallic thin films. A summer school in the area of non metallic thin films appeared to be a very fruitful concept and, hence, in October, 1973, A.S.l.M.S. made a proposal to N.A.T.O to hold this second summer school in Corsica in September 1974. The basic idea behind this summer school was essentially to stress and synthesize physical properties and structure of non metallic thin films. The main reason for this was the feeling that many laboratories are very specialized and that few engage in both physical and structural analysis of these films. The program included a large section on' physical studies: electrical (transport, interface effects, switching), mechanical and optical. There was also a large section o~characterization, crystal structure, chemical composition (stoichiometry is always a difficult problem), bonding and electronic structure.
 

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Contents

General Introduction
1
Preparation Methods for Thin Films
9
Growth Processes
49
Electronic States in Semiconductors e
93
Part II
103
Structure Determination of Thin Films
123
PhysicoChemical Analysis of Thin Films
141
Thickness Measurements
163
Mechanical Properties of NonMetallic Thin Films
273
Thin Films in Optics
355
Radiation Effects in Thin Films
383
Part IV
391
APPLICATIONS
409
Thin Film Applications in Microelectronics
417
Application of Thin NonMetallic Films in Optics
445
Some Applications of NonMetallic Thin Films
459

Electronic Transport Properties
189
Ionic Transport in Thin Films
219
Polarization
225
A Discussion of Thermal
253
List of Participants
495
Index
501
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